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ULVAC Qulee CGM Series CGM 052 Compact Process Gas Monitor

  • ULVAC Qulee CGM Series CGM-052 Compact Process Gas Monitor
Price:
$5,500.00
SKU:
BG00319
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Product Description

On Sale ULVAC Qulee CGM Series CGM-052 Compact Process Gas Monitor & G-TRAN SW1 Pirani, Condition Like New and ready to use, often paired together to form an integrated and automated ecosystem of vacuum processes and gas analysis. This combined configuration is standard on the production floor primarily used in semiconductor processing and advanced sputtering systems.

Core Roles in the Vacuum System

  • ULVAC G-TRAN SW1 (The Gatekeeper): This wide-range transducer monitors pressure from atmospheric levels down to the medium-to-low vacuum threshold (10⁵ Pa down to 5 × 10⁻² Pa). It acts as a safety gate. It determines when the vacuum environment is stable and low enough to safely activate the sensitive gas monitor. 

  • ULVAC Qulee CGM-052 (The Analyzer): This high-sensitivity Quadrupole Mass Spectrometer (QMS) takes over in the high-vacuum processing range (typically under 1 Pa). It analyzes real-time gas compositions, tracking impurities, air leaks, and process byproduct ratios without requiring bulky, separate differential pumping systems.

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